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石英表面蚀刻保护涂料的制备及其性能

PREPARATION AND PROPERTY OF PROTECTIVE COATING FOR QUARTZ SURFACE

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【作者】 唐冬雁吕祖顺强亮生夏新华

【Author】 TANG Dongyan,LU Zushun,QIANG Liangsheng,XIA XinhuaDepartment of Applied Chemistry,Harbin Institute of Technology,Harbin 150001

【机构】 哈尔滨工业大学应用化学系哈尔滨工业大学应用化学系 哈尔滨150001哈尔滨150001哈尔滨150001

【摘要】 采用聚苯乙烯 (PS)和丁二烯与苯乙烯的嵌段共聚物 (SBS)为成膜物 ,以硫酸钡、聚异丁烯为填料和改性剂 ,并加入偶联剂 ,获得有较强防腐能力的蚀刻用保护涂料并筛选出最佳工艺条件 .在较高温度下 ,该涂料对饱和氟化氢、饱和氟化氢铵溶液等强腐蚀性介质有良好的化学稳定性 ,可用于玻璃、石英蚀刻中的表面防腐

【Abstract】 A kind of higher anticorrosion coating used for etching processes of guartz was prepared by selecting polystyrene(PS) and styrene-butyldiene-styrene(SBS) as main membrane-forming materials,barium sulfate as filler and polyisobutene as modified agent.The affections of every component in the system were examined and discussed in detail.The optimal processing parameters were determined by orthogonal design based upon the basic experiments.The properties were determined by the process analogue to glass plate.The results indicated that,when the ratios of PS to SBS,of total amount of PS to SBS with polyisobutene and the amount of additives were 1∶1,5∶1 and 2%(mass%),respectively,the immersion ratio(mass/mass) was 63.9.Additionally,the obtained coating had relative high anticorrosion effect to strong acidic medium such as HF and NH 4HF 2,and showd a good prospect in application as protective coating for etching process of inorganic components.

【关键词】 蚀刻保护涂料聚苯乙烯硫酸钡
【Key words】 etchingprotective coatingpolystyrenebarium sulfate
【基金】 国防“九五”重点预研项目 (30 .3.4/A9760 0 0 -10 )
  • 【文献出处】 腐蚀科学与防护技术 ,Corrosion Science and Technology Protection , 编辑部邮箱 ,2003年02期
  • 【分类号】TQ630
  • 【被引频次】2
  • 【下载频次】99
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