【摘要】 由于碳纳米管具有独特的结构和性能 ,因而自从被发现以来一直受到人们的关注。近年来 ,已利用各种方法成功地合成出碳纳米管 ,特别是利用化学气相沉积方法制备高度准直的碳纳米管。分析了该方法中催化剂厚度对碳纳米管直径的影响 ,利用负衬底偏压热灯丝CVD系统和不同厚度的NiFe催化剂在Si衬底上直接生长 ,并用扫描电子显微镜来研究碳纳米管的生长过程。结果表明催化剂颗粒封闭了碳纳米管的顶端 ,催化剂厚度对碳纳米管的直径有较大的影响 ,碳纳米管的平均直径随催化剂厚度的增大而增大更多还原

【Abstract】 Owing to unique structure and characteristic of carbon nanotubes, much more are attracted attentions since they were discovered .In recent years, carbon nanotubes have been successfully synthesized by various methods. Especially, highly aligned carbon nanotubes were grown by chemical vapor deposition (CVD). In the work, it is studied that different thickness of catalyst affects the diameters of carbon nanotubes. Carbon nanotubes were grown on silicon substrate coated with different thick NiFe films by bias-enhanced hot filament chemical vapor deposition and their growth was investigated by scanning electron microscopy,Onset of analyzing of deformation of different thick catalyst films during heating the filament. The results indicate that catalyst particles encapsulate the top ends of carbon nanotubes, and that the catalyst thickness greatly affects the diameters of carbon nanotubes, which increas with increment of the thickness of NiFe films.更多还原