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微球板电子倍增器基体制备技术研究

Preparation for Microsphere Plate Electron Multiplier Substrate

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【作者】 王新富丽晨吴奎王国政端木庆铎李野姜德龙田景全

【Author】 WANG Xin, FU Li-chen, WU Kui, WANG Guo-zheng, DUANMU Qing-duo, LI Ye, JIANG De-long, TIAN Jing-quan(School of Science, Changchun University of Science and Technology, Changchun 130022, China)

【机构】 长春理工大学理学院长春理工大学理学院 吉林长春 130022吉林长春 130022吉林长春 130022

【摘要】 新型微球板电子倍增器和微通道板相比具有高增益、无离子反馈、制备简单、造价低廉等优点。介绍了微球板电子倍增器的工作原理、特点和广阔的应用前景。由于微球板基体的形成技术是微球板制备的关键技术,论文从理论上研究了微球板基体烧结过程中的烧结速率。并采用自行设计组分的高铅玻璃,用立式炉成珠设备进行了玻璃微珠的制备,探索了微球板制备过程中玻璃微珠的分级技术、微球板电子倍增器基体成型工艺和技术。制备出基本满足要求的微球板电子倍增器基体。给出了制造的样品和文献上样品结构的SEM对比照片,最后对实验过程中的一些现象进行了分析,并给出了实验的结论。

【Abstract】 Microsphere plate (MSP) is a compact electron multiplier with temporal and spatial resolving power. It consists of glass beads with diameter of 40 to 60/μm. These glass beads were sintered to form a thin, porous plate. The surface of the glass beads is covered with partially conductive, secondary electron emissive material. The two faces of the plate are coated with conductive electrodes. When voltage is applied between the two electrodes, secondary electron multiplication takes place among the glass beads. MSP is used in vacuum system for the detection of charged particles. Its applications include particle imaging, time-of-light mass spectroscopy, particle monitoring, and electron microscopy. There are several key technologies in the process of fabricating final MSP. First of all, the formation of MSP substrate is the most important, due to the requirement of porosity and strength. The quality of the substrate will directly affects on the quality of final MSP. In this paper an introduction of the operating principle and characteristics of MSP was presented. Based on twin-ball sintering mode, a sintering rate formulation in the sintering process was established. In the actual sintering experiment, this twin-ball mode is superior to the panel-ball mode proposed by Kuczynski, so the sintering rate formulation agrees to the experiment well and can help us to operate technological process properly. In this paper the experimental processes on the formations of glass-beads and MSP body were presented also. The specific experiment included the followings: designed high lead glass as composition which can be used for formatting glass-beads, fabrication of glass-beads with vertical stove which was designed by ourselves, explored sorting technology of glass-bead and technological process of MSP. In the end, some comparison images of the experimental samples were given with that taken from reference. From these images.it will be found that our glass-beads’ sphericity is good and sorting technology was well done, the sintering process controlled well, the MSP body has a quantity of connective gaps and passage, and has little distortion. Generally speaking, the experiment is successful. In the whole experiments, we think it is important to solve the sorting technology of glass-beads. In order to form gaps and passage, it needs precisely control the sintering process and make possible methods to improve the MSP quality. In order to minimize the pollution to MSP, the whole experiment must be made in the clean environment. The experiment on fabricating MSP is unprecedented at home, so the experiment is a new one. The experiment itself has embodied the spirit of innovation, especially in the process of formation of MSP body and minimizing the pollution to MSP in the whole process. All of these will enable the follow researcher to improve the fabricating process and pave the way for further study on MSP.

【关键词】 微球板微通道板烧结
【Key words】 MSPMCPsintering
  • 【文献出处】 发光学报 ,Chinese Journal of Luminescence , 编辑部邮箱 ,2003年06期
  • 【分类号】TN144
  • 【被引频次】3
  • 【下载频次】96
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