【摘要】 该文介绍一种基于电解质溶液-绝缘层-半导体(EIS)结构的光、机、电一体化的微阵列光寻址电位传感器系统(LAPS)。文中研讨了LAPS的基本原理和微阵列光寻址电位传感器系统的制造。通过实验证明了芯片厚度、调制频率、曲线线性度对系统性能的影响,获得多种生化参数的光寻址测试结果。更多还原

【Abstract】 This paper describes a kind of micro-array Light Addressable Potentiometric Sen-sor(LAPS) system based on the Electrolyte-Insulator-Semiconductor (EIS) structure, in which electronic technology, optical technology and mechanical technology are applied. The mechanism of the LAPS is investigated and a trial specimen of the LAPS is developed . The research work finds how the thickness of the chip, the linearity of the I-V curve and frequency affect the performance of the LAPS system, and obtains testing results of urea, penicillin and pH value.更多还原