【摘要】 对铁电材料SrTiO3 (STO)薄膜的介电性质及其在微波器件特别是高温超导滤波器频率调节方面的应用进行了研究 .在相关理论分析和软件仿真计的基础上的计算 ,获得了电调微带线谐振器的频率调节范围等电特性与器件结构参数的关系 .我们采用YBCO作为STO薄膜的驱动电极 ,使用脉冲激光沉积的方法制备了叉指结构的电调薄膜 .利用微波近场显微镜测量了电场对STO薄膜的介电性质的影响 .更多还原

【Abstract】 In this paper, we did some research on the dielectric properties of SrTiO-3(STO) thin film and its application in the frequency tuning of microwave devices. On the base of corresponding theory analysis and software simulation, we obtained the relationship between some electronic parameters, such as frequency modulation range and quality factor, of a microstrip-line resonator and its structure parameters. We have fabricated the tuning section using interdigital YBCO electrodes and a STO thin film by the pulse laser deposition method and have investigated its tuning properties by using a scanning microwave near-field microscope.更多还原