【摘要】 用溶胶-凝胶法制备SnO₂前驱液,然后用提拉法分别在单晶Si和Al₂O₃基片表面制备出SnO₂前驱膜,再用脉冲Nd:YAG激光烧结前驱膜使其转变为晶体SnO₂薄膜。用XRD分析了单晶Si表面的SnO₂薄膜,研究激光功率对SnO₂薄膜相组成的影响。TEM观察表明,激光烧结后的薄膜SnO₂颗粒均匀,直径约为10nm。用激光烧结法制备的SnO₂薄膜对浓度为1.80×10^-4丙酮的最高灵敏度为30～40,明显高于用传统烧结法制备的SnO₂薄膜的灵敏度。激光烧结能降低薄膜具有最高灵敏度的工作温度。更多还原

【Abstract】 SnO2 precursor solution was prepared with sol-gel method, after the precursor films formed on Si and AI2O3 substrates with dip-coating method were irradiated with pulsed Nd:YAG laser beam, crystallized SnO2 films were obtained. The phase composition of SnO2 films sintered by laser with different power was analyzed by XRD. TEM observation shows SnO2 grains in films are uniform with about 10 nm in size. The gas sensing tests show that the maximal sensitivity of laser sintered SnO2 films to 1.80×10-4 acetone is 30-40, which is much higher than that of Sn02 films sintered in furnace. Furthermore, laser sintering technique can lower the working temperature at which the SnO2 films shows maximal sensitivity.更多还原