【摘要】 对薄膜淀积的各种PVD技术和新型薄膜研究进展进行了综述 ,讨论了多组分硬质薄膜低温制备存在的问题 ,指出了解决的办法 ;归纳了影响多组分硬质薄膜在三维基体上均匀、均质淀积的因素 ,重点讨论了基体旋转与靶源配置问题 ;指出了用低温PVD法淀积多组分超硬薄膜研究方向。更多还原

【Abstract】 A detailed review was made on the development of multicomponent hard films and/or coatings,including polycrystalline coatings,multilayered coatings,superlattice films,and functionally graded coatings.The problems and solutions for the preparation at low temperature were indicated.Some deposition techniques,for example,magnetron sputtering ion plating,reactive ion plating,activated reactive evaporation,cathodic multi-arc evaporation and its reactive variants,were recommended.All the parameters that affected the formation and properties of the films or coatings were summarized.The routes to realize the homogeneous deposition of PVD films or coatings on three-dimensional(3D)parts were discussed.the development trends were proposed.更多还原