【摘要】 研究了磁控溅射和电子束蒸镀工艺对在LiNbO3基片上沉积铝膜的结构、表面形貌的影响。采用匀胶、曝光和反应离子刻蚀工艺,制备出中心频率在920MHz纵向谐振耦合换能器结构的声表面波滤波器。结果表明,电子束蒸镀的铝膜与LiNbO3单晶间具有较好的结合力,具有适合SAWF器件制备所需的微观结构,在随后的叉指换能器制备过程中表现出良好的加工性能和声传播特性。更多还原

【Abstract】 The effects of the DC magnetron reactive sputtering technique and the electron beam vapour deposition technique on surface morphology, microstructures of the Al thin films deposited on LiNbO3 substrate were investigated The 920MHz surface acoustic wave(SAW)filter that use the longitudinally coupled transducers had been fabricated on LiNbO3 substrate using electron beam direct writing and dry etching processes These results show that electron beam vapour deposition technique can obtain the Al thin films with satisfied properties in the preparation of SAW filters because high binding force between LiNbO3 substrate and Al thin films更多还原