【摘要】 PST铁电薄膜是一种具有优良铁电、热释电和介电等性能的铁电材料。该材料在红外探测器、红外焦平面阵列、热成像器件、非易失性铁电存储器和大容量电容器等方面具有广泛的应用。PST铁电薄膜的制备方法多种多样,各具优缺点,不同的制备工艺对薄膜的性能有影响。叙述了PST铁电薄膜的制备技术、电性能和在热释电红外探测器方面的应用。更多还原

【Abstract】 PST thin films are ferroelectric materials with many advantages such as excellent ferroelectric, pyroelectric and dielectric properties. They have a wide range of applications in pyroelectric infrared devices, uncooled infrared focal plane arrays, infrared thermal imaging devices, non-volatile ferroelectric RAM and large value capacitor. There are many methods for preparation of PST thin films, and each has its advantages and disadvantage . The properties of PST thin films depend on the preparation conditions . This paper reviews the preparation methods and electrical properties of PST thin films.更多还原