【摘要】 离子束辅助沉积(IBAD)是在气相沉积的同时辅以离子束轰击的薄膜制备方法,可在低温下合成致密、均匀的薄膜。介绍了IBAD技术的概况,列举了具体应用领域,描述了射频ICP离子源辅助电子束蒸发,最后对IBAD的前景加以评论。更多还原

【Abstract】 Ion beam assisted deposition (IBAD) is a method of thin film deposition which can produce compact and uniform thin films at low temperatures. This paper reviews the current status of IBAD,describes some of its application fields introduces RF-ICP beam assisted electron beam evaporation and points out the prospect of IBAD technology.更多还原