【摘要】 介质阻挡放电(DBD)是一种可以在常压下工作的放电形式,以这种放电形式为离子源的介质阻挡化学气相沉积(DBD-CVD)技术可以以较高的反应物流量实现多种薄膜的沉积,因而有广阔的应用前景。综述了DBD技术的发展历史及相关理论,着重介绍了DBD-CVD技术及其应用现状,并提出展望。更多还原

【Abstract】 Dielectric barrier discharge (DBD) works under normal pressure. Dielectric barrier dischargechemical vapor deposition technique (DBD-CVD) in which DBD is used as plasma source makes high reactant concentration chemical reactions possible,thus offering good potential for wide applications. In present paper,the history of DBD and related theories are reviewed,the DBD-CVD technique and its applications are described,and prospects for future development are also outlined.更多还原