【摘要】 介绍了以角锥棱镜为目标镜的杠杆式光学轮廓仪的测量方法。应用矢量坐标变换的方法理论推导了在大量程范围内测量位移与光程差的非线性关系,给出了解析解与数值解。通过理论数值解曲线图的分析,提出了采用二阶拟合的补偿方法,求出了补偿后理论误差结果。以微动工作台为位移发生器,在5.2mm范围内,实验给出了轮廓仪的测量结果,并分别计算了测量结果的线性度误差与二阶拟合补偿后的误差。更多还原

【Abstract】 The measurement methods of lever-type optical profilometer with pyramid as its target mirror are introduced. The nonlinear relation between light travel distance and measured displacement is (deduced) by vector coordinate transforms, and their analytic and numerical results are given. Second-order polynomial to fit and compensate measured value is presented by analyzing the numerical curve graph. (The experiment) gives the measurement data in the range of 5.2 mm when taking micro-motion table as (displacement) generator, and the (linearity) error and compensate error of second-order fit are computed.更多还原