【摘要】 综述了湿度传感器的研究现状。分析了多孔硅湿度传感器的感湿机理,介绍了几种多孔硅湿度传感器的制作工艺及结构,并讨论了它们的优缺点。最后,对多孔硅湿度传感器的应用前景作了展望。更多还原

【Abstract】 Existing state of the recent research of humidity sensors is summarized. The humidity sensitive mechanism of porous silicon humidity sensor is analysed. Several manufacture techniques and structures of porous silicon humidity sensor are introduced, then merits and demerits of them are discussed. Finally,prospects of (future) applications of porous silicon humidity sensor are presented.更多还原