【摘要】 微电子机械系统的快速发展对其建模仿真也提出了较高要求。首先介绍了一种微电子机械系统原理级描述仿真方法,它基于成熟的微机械元件库,提供微器件的原理级描述,使得仿真更简单、更高效,但目前其适用范围有限。然后介绍了用这种方法分析叉指式微电容加速度计的结果。更多还原

【Abstract】 The increasing development of microelectromechanic al systems(MEMS) has heightened the demand for modeling and simulation. A simulati ng method of principle level description for MEMS which based on mature element libraries is presented.An approach introduced makes modeling and simulating easi er and more efficient,but at the cost of narrowing the range of micromachined de vices which can be so treated.Results for the simulation of the comb acceleromet er are given.更多还原