【摘要】 列举了几种多晶硅高温压力传感器的热灵敏度漂移补偿方法,并分别讨论了它们的原理及特点。对采用多晶硅热敏电阻器进行补偿的两种补偿方法进行了详细地分析和测试。实验表明,这两种补偿法更适用于多晶硅压力传感器。更多还原

【Abstract】 Several compensation methods of thermal sensitivity shift of polysilicon pressure sensor are introduced,whose principles and characteristics are discussed.Two compensation methods with polysilicon thermal resistor are analyzed and tested particularly.The two compensation methods are more applicable to polysilicon pressure sensor through the experiments.更多还原