【摘要】 可靠性是产品质量的重要组成部分 ,微电子工艺可靠性是保证 IC产品可靠性的关键一环。从 IC生产环节考虑 ,详细讨论了微电子工艺可靠性及其保证措施 ,重点讨论了原材料控制、设备与工艺控制及洁净环境控制的重要性 ,这些因素是生产高可靠性 IC产品的有力保证。更多还原

【Abstract】 Reliability is very important to product quality and the reliability of microelectronics process is one of the most important factors to high quality IC products. According to the production of IC, this paper discusses in detail the conception of microelectronics process reliability and measures taken to keep the quality. Especially, the study also deals with how to control the raw materials and processed materials, equipment, and technics control and clean environment. All these factors are necessary guarantee of manufacturing IC production with high reliability.更多还原