【摘要】 用化学湿法腐蚀的方法制作了SOI光波导 ,并且用三维波束传播方法分析和设计了单模波导和 1× 2 3dB多模干涉分束器 ,修正了有效折射率和导模传输方法的误差 .制作的器件具有低传输损耗 (- 1 37dB/cm)、低附加损耗 (- 2 2dB)、良好的均衡性 (0 3dB)等优良性能 .更多还原

【Abstract】 SOI waveguides fabricated by wet-etching method are demonstrated.The single mode waveguide and 1×2 3dB MMI splitter are analyzed and designed by three dimensional beam propagation method to correct the error of effective index method and guided mode method.The devices are fabricated.Excellent performances,such as low propagation loss of -1.37dB/cm,low excess loss of -2.2dB,and good uniformity of 0.3dB,are achieved.更多还原