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一种基于卷积核用于光刻模拟的计算稀疏空间点光强的方法(英文)

A Kernel-Based Convolution Method to Calculate Sparse Aerial Image Intensity for Lithography Simulation

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【作者】 史峥王国雄严晓浪陈志锦高根生

【Author】 Shi Zheng 1,Wang Guoxiong 1,2 ,Yan Xiaolang 1,Chen Zhijin 1 and Gao Gensheng 1Project supported by National Natural Science Foundation of China(No.60176015) Shi Zheng male,was born in 1967,associate professor working on IC CAD. Wang Guoxiong male,was born in 1970,PhD candidate working on precisely designing technology of VDSM/UDSM IC masks. Yan Xiaolang male,was born in 1947,professor working on VLSI layout algorithm. Received 4 October 2002,revised manuscript received 22 November 2002○c 2003 The Chinese Institute of Electronics(1 Institute of VLSI Design,Zhejiang University,Hangzhou 310027,China) (2 College of Electronics and Information Engineering,Anshan University of Science and Technology,Anshan 114002,China)

【机构】 浙江大学超大规模集成电路设计研究所浙江大学超大规模集成电路设计研究所 杭州310027杭州310027鞍山科技大学电子与信息工程学院鞍山114002杭州310027杭州310027

【摘要】 光学邻近校正 (OPC)系统要求一种精确、快速的方法来预测掩模图形转移到硅圆片的成像结果 .基于 Gabor的“降解为主波”方法 ,一个部分相干成像系统可以用相干成像系统的叠加来近似 ,并用高斯过滤器来模拟光刻胶横向扩散和一些掩模工艺效应 ,由此提出了一种基于卷积核的精确、快速地用于光刻模拟的稀疏空间点光强计算方法 .这种模型的简单性从本质上给计算和分析带来了好处 .仿真结果说明这种方法是有效的

【Abstract】 Optical proximity correction (OPC) systems require an accurate and fast way to predict how patterns will be transferred to the wafer.Based on Gabor’s "reduction to principal waves",a partially coherent imaging system can be represented as a superposition of coherent imaging systems,so an accurate and fast sparse aerial image intensity calculation algorithm for lithography simulation is presented based on convolution kernels,which also include simulating the lateral diffusion and some mask processing effects via Gaussian filter.The simplicity of this model leads to substantial computational and analytical benefits.Efficiency of this method is also shown through simulation results.

【基金】 国家自然科学基金资助项目 (批准号 :60 1760 15 )~~
  • 【文献出处】 半导体学报 ,Chinese Journal of Semiconductors , 编辑部邮箱 ,2003年04期
  • 【分类号】TN305.7
  • 【被引频次】5
  • 【下载频次】115
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