【摘要】 研究了分子束外延中引入原子氢后 ,原子氢对外延层表面形貌特征形成的诱导作用 .原子力显微镜 (AFM)测试表明 ,在 (311) A Ga As表面 ,原子氢导致了台阶状形貌的形成 ,在这种台阶状表面进一步生长了 In As量子点 ,测试结果表明其位置分布的有序化受到台阶高度和台阶周期的制约 .这为实现量子点结构的有序化控制生长提供了一定的实验参考 .更多还原

【Abstract】 The effects of atomic hydrogen on surface morphology of epitaxial layers grown by molecular beam epitaxy are investigated.AFM pictures show that atomic hydrogen leads to the formation of step bunching on (311)A GaAs surface.The sites distribution of InAs quantum dots (QDs) grown on this step like morphology surfaces is slightly positioned by the steps of the surfaces.All these results give useful experimental references to the site controlled growth of QDs.更多还原