【摘要】 报道了一种利用MEMS技术制备 ,基于双材料悬臂梁结构的非制冷红外焦平面阵列 (FPA)并配有可见光读出部分的红外成像系统 ,可以在 8～ 14 μm光谱区得到成像。基于该结构的非制冷红外成像系统利用的是光力学效应原理。我们采用MEMS表面硅工艺制备FPA ,深入研究了双材料悬臂梁结构成像系统的基本原理 ,工艺制备难点和响应结果更多还原

【Abstract】 An uncooled infrared (IR) imaging system consisting of a focal plane array (FPA) based on bi material cantilevers, with a visible optical readout system may receive an IR imaging result in the spectral range from 8～14μm. This uncooled micro optomechanical IR imaging system can be availably operated at room temperature. In this paper the principle of the uncooled infrared imaging system based on bi material cantilever pixels is illuminated, then the fabrication process of FPA and some experiment results are introduced.更多还原