【摘要】 硅微电容式加速度传感器具有灵敏度高、噪音低、漂移小、功耗低、结构简单等优点 ,在军民两用市场中有着广泛的应用前景。本文针对自主开发设计的一种带折叠梁的二维叉指电容式硅微加速度传感器 ,采用力法求解了其主轴刚度 ,为进一步研究该二维微加速度传感器的动态响应特性提供了理论依据更多还原

【Abstract】 Capacitive silicon microaccelerometers have a wide application in either commercial or military markets because of their performances such as high sensitivity,low noise,small drift,low power cost and simple structure. In this article,a kind of 2 D capacitive silicon microaccelerometer with the folded beam is designed and its main axis stiffness is caculated using force method,which provides the basis for studying dynamic characteristics of this kind of microaccelerometer.更多还原