【摘要】 根据MEMS测试的要求 ,设计并实现了一种基于计算机视觉的MEMS测试系统。该系统是一个典型的光、机、电、算集成的MEMS测试系统 ,已应用于MEMS微结构几何尺寸和动态特性等的测量。因采用了亚像元定位技术 ,系统具有较高的测量精度。应用表明该系统具有较好的灵活性和扩充性 ,测量速度快 ,测试简便 ,有较好的工程应用价值更多还原

【Abstract】 According to the requirement of the MEMS test, a MEMS testing system using computer microvision was developed. This is a typical optical, mechanical, electronic and calculated integral system and can be applied to the geometry and dynamic measurement of MEMS microstructure. A high measure accuracy can be achieved with the sub pixel location. The system has been shown flexible, expandable and significantly faster and simpler testing methods through the application in MEMS devices, so it is of relatively high engineering application value.更多还原