【摘要】 SnO2 是最早使用也是目前使用最广泛的一种气敏材料 ,使用该材料设计制作的气敏传感器具有许多优点。在简要介绍溅射镀膜的成膜过程和特点的基础上 ,着重介绍了SnO2 膜的制备流程 ,分析了功率和温度变化对成膜质量的影响更多还原

【Abstract】 SnO 2 is the one of gas sensitivity materials that are used the earliest and the most widely, gas sensitivity sensors made of this material have many advantages. Based on the simple introduction of the course of sputtering film plating and characteristic, the preparation flow is introduced in detail, the effects of power or temperature changing on the film quality are analyzed.更多还原