【摘要】 针对能代表MEMS器件特征的悬臂梁结构 ,采用了SPICE中标准多项式受控源的形式建立悬臂梁的多模态小信号等效电路宏模型。在外力的作用下 ,用SPICE软件对此悬臂梁宏模型和外加电路进行了系统级的模拟 ,得到分布参数的力传感器的输出电压幅频特性曲线 ;最后采用COVENTORWARE软件进行了模型的各个模态的谐振频率和相关曲线的验证。更多还原

【Abstract】 Aimed at the cantilever beam structure which can stand for the characteristic of MEMS devices, standard polynomial controlled sources of SPICE are introduced to build multi mode small signal macromodel of equivalent circuit for cantilever beam. Under the force loaded outside, the output voltage amplitude frequency response characteristic of distributed parameter force sensor is presented, by the system simulation to the cantilever beam macromodel and periphery circuits with SPICE. The resonance frequencies of each modal and related curves of the model are verified with the COVENTORWARE software.更多还原