【摘要】 实现MEMS器件系统级模拟的关键是建立其宏模型。由单层梁构成的机电耦合系统的等效电路宏模型 ,已做过深入的研究 ,但实际的MEMS器件通常都是多层的 .本文提出了一种基于力 电压 (F V)类比的、适用于由多层梁构成的机电耦合系统的等效电路宏模型 ,该模型可进行小信号时域和频域分析 ,能为多层梁机电耦合系统的设计带来很大的方便。模拟结果表明 ,该模型具有较高的精度更多还原

【Abstract】 The key of implementing system level simulation of microelectromechanical systems (MEMS) is to create macromodels of them. The macromodel of single layer beam MEMS has been studied widely, but in reality MEMS is usually made of multi layer beams. A macromodel for multi layer beam MEMS based on force voltage (F V) analogy is proposed, the model is suitable for time and frequency domain analysis of small signals, it is useful to design of multi layer beam MEMS. Simulating results show that the model has high accuracy.更多还原