【摘要】 简要论述了虚拟运行在MEMS设计系统[1,2 ] 中的重要性 ,引入了动态运动规律和数学库的概念 ,提出了在单机多任务系统上 ,以事件发生时间推进的机制 ,带有多个运动部件及其运动规律的微机械系统虚拟运行实现框架。并结合静电微马达和双金属驱动微流量泵为例 ,分析了虚拟运行中数学库的组织 ,动态运动规律的产生过程以及三维可视化的实时问题 ,所提出并采用的实现框架适用于微马达[3] 、微泵[4 ] 、微加速度计[5] 等微电子机械系统的设计和虚拟运行更多还原

【Abstract】 The importance of virtual operation for integrated design environment of MEMS device was summarized, and a feasible framework for virtual operation of multiple component MEMS device was put forward, using dynamic running law and mathematical library under the multitask operating system and event interruption mechanism. Combined with the instances of micro motor and micro pump, the organizing of mathematical library, the producing of the dynamic running law, and the real time mechanism of 3D visualization in virtual operation were analyzed. The presented approach can be extended to the design and virtual operation of micro motor, micro pump and micro accelerator.更多还原