【摘要】 概括了宽带隙半导体材料碳化硅的主要特性及生长方法,介绍了其在微电子及光电子领域的应用,并对其发展动态及存在问题进行了简要评述。更多还原

【Abstract】 The main characteristics and growth methods of SiC materials are s ummarized.Its applications in the fields of microelectronics and optoelectronic s are also introduced.The trends of the development of SiC materials and the e xisting problems are appraised and commented.更多还原