【摘要】 采用溶胶-凝胶工艺,使用旋涂方法在单晶硅片、石英玻璃和K9玻璃上制备SiO2/TiO2系列多层膜。采用椭偏仪、透射电镜等对所制得的多层膜的性能进行了研究。结果表明实验条件对SiO2/TiO2多层膜的制备非常重要。通过对实验条件的改善与优化,可以镀制出性能优良的SiO2/TiO2多层膜,以用于微型谐振腔、滤光片、一维光子晶体和传统的光学高反膜的研究。更多还原

【Abstract】 SiO2/TiO2 multilayer films on silicon, quartz, K9 glass wafer were obtained by sol-gel process and spin-coating technique. The properties of the multilayer films were studied with ellipse-polarization-light thickness measurement and TEM. The results showed that the experiment condition was crucial for the preparation of the SiO2/TiO2 multilayer films. High quality SiO2/TiO2 multilayer films could be obtained by improve the experiment condition, which could be applied in microcavities, light filter, photon crystal and high reflect film.更多还原