【摘要】 推导了电容式微机械加速度计的悬臂梁在加速度作用下可能出现的两种挠度情况,分析了在制造过程中残余应力对于加速度计造成的影响,推导了电容式微加速度计的工作原理,并推荐了相应的工作模式.更多还原

【Abstract】 Two cases of deflection of the beam of the micro-accelerometer occurred under a certain acceleration were deduced in the paper. And the effect of the residual stress to accelerometer during fabrication was analyzed. The working principle of the capacitive micro-accelerometer was deduced. And the related operating mode was recommended also.更多还原