【摘要】 用大直径中空柱状阴极直流磁控溅射装置，在Φ５１ｍｍＬａＡｌＯ３衬底上制备了ＹＢＣＯ薄膜。利用Ｘ射线衍射、电子通道花样、Φ扫描、扫描电镜对薄膜进行了分析。在５１ｍｍ直径范围内薄膜的零电阻温度Ｔｃ为８８～９０Ｋ。更多还原

【Abstract】 Φ 51 mm YBCO superconducting thin film deposited on LaAlO 3 wafer was manufactured by direct current magnetron sputtering equipment with large hollow cathode . X ray diffraction, electronic tunnel pattern, Φ scanning and SEM were used to analyse the film. The zero resistance transition temperature T c is 88～89 K in the area of 51 mm in diameter.更多还原