节点文献
隧道二极管用锗单晶制备的温场设计
Temperature Profile Design for Ga Heavily-doped Ge Single Crystal Growth
【摘要】 通过设计合适的温场,解决了重掺单晶生长过程中的组分过冷和位错密度高的问题,获得了高掺杂浓度高迁移率的无位错单晶。
【Abstract】 Proper temperature profile was designed to solve the problems of heavilydoped Germanium single crystal growth. High temperature gradient in the melt near the solid-liquid interface was required to prevent constitution supercooling, and lower temperature gradient in the crystal was obtained at the same time to decrease dislocations. High Hall mobility and freedislocation single crystal were obtained.
【关键词】 温场;
锗;
单晶;
重掺;
【Key words】 Temperature profile; Heavilydoped; Germanium; Single crystal growth;
【Key words】 Temperature profile; Heavilydoped; Germanium; Single crystal growth;
- 【文献出处】 稀有金属 ,CHINESE JOURNAL OF RARE METALS , 编辑部邮箱 ,1998年02期
- 【分类号】O782.9
- 【下载频次】56