节点文献

影响金刚石薄膜生长因素的研究

Investigation of Influence Factors on Diamond Film Growth

  • 推荐 CAJ下载
  • PDF下载
  • 不支持迅雷等下载工具,请取消加速工具后下载。

【作者】 邵淑敏吕向英于剑丁乐礼席光康张猛周志强李胜林彭华军邵牟舟

【Author】 Shao Shumin Lu Xiangying Yu Jian Ding Leli Xi Guangkang Zhang Meng Zhou Zhiqiang Li Shenglin Peng Huajun Shao Mouzhou (Dept. of Electron Science, Nankai University)

【机构】 南开大学

【摘要】 本文用HFCVD法对在硬质合金衬底上生长金刚石薄膜的诸多影响因素,如衬底的预处理、碳源浓度和热丝及衬底温度等进行了系统地研究并最终找出在该衬底上生长金刚石薄膜的最佳生长条件。

【Abstract】 Abstract Diamond coating on carboloy metal was prepared by HFCVD. It is found that many factors such as pretreatment of substrate, the concentration of acetone and the temperature of hot filament and substrate strongly influenced the growth process and properties of diamond film. Finally the best growth conditions of diamond coating on carboloy metal was found.

  • 【分类号】TB43
  • 【被引频次】8
  • 【下载频次】141
节点文献中: 

本文链接的文献网络图示:

本文的引文网络