【摘要】 动态流量法超高真空标准装置是用于校准真空规的绝对真空计量标准。它由校准系统、恒压式气体微流量计和抽气系统组成。极限压力６．５×１０－９Ｐａ，校准范围１０－２～１０－７Ｐａ，不确定度３％（１０－２～１０－６Ｐａ）和１０％（１０－７Ｐａ）。更多还原

【Abstract】 The dynamic flow method UHV standard apparatus is an absolute vacuum standard for vacuum gauge calibration.It is composed of a calibration system,a gas flowmeter and pumping system.The the ultimate vacuum is 6.5×10 -9 Pa the calibration range is from 10 -2 to 10 -7 Pa and the uncertainty amounts to 3% from 10 -2 to 10 -6 Pa and increases to 10% in 10 -7 Pa.更多还原