【摘要】 微波等离子体化学气相沉积（ＭＰＣＶＤ）是制备金刚石薄膜的一种重要方法。为了获得金刚石薄膜的高速率大面积沉积，在国内首次研制成功了５ｋＷ带有石英真空窗的天线耦合水冷却不锈钢反应室式ＭＰＣＶＤ装置。初步用该装置成功在硅基片上沉积得到了金刚石薄膜。更多还原

【Abstract】 Microwave plasma chemical vapor deposition (MPCVD) is an important methed for diamond film preparation.5 kW antenna coupled MPCVD setup with a quartz vacuum window and water cooled stainless steel reaction chamber for higher depositing rate and lager depositing square was developed in China for the first time.Diamond films were prepared on silicon substrates with this set up.更多还原