【摘要】 利用压电石英晶体设计并制作了一种谐振器型声表面波加速度传感器，并对其性能进行了测试和分析。试验结果表明，采用声表面波谐振器制作成的谐振器型声表面波加速度传感器具有灵敏度高、线性度好的特点，测量精度及短期稳定性等指标均已达到战术级惯性仪器对加速度计的要求，具有很好的发展前景。更多还原

【Abstract】 A new type of quartz-based resonant SAW accelerometer is designed and fabricated. Its performance is tested. Test results show that this type of resonant SAW accelerometer has very high sensitivity and good linearity. The precision and short stability required by tactical-grade instruments are achieved. This accelerometer will have wide application in inertial navigation system.更多还原