【摘要】 本文报道一种量程为１ｋＰａ的扩散硅微机械结构微压传感器。实现了高灵敏度微压传感器的非线性内补偿和强过载保护以及高共振频率，分析研究了最佳条件。微压传感器的非线性为０．１％ＦＳ，其过载保护能力已超过５００倍满程压力，共振频率为９ｋＨｚ。更多还原

【Abstract】 This paer presents a diffusing silicon lowpressure sensor with a micromachining structure.Its full-scale pressure is 1kPa.The innercompensation of nonlinearity and the protection to extra-overpressure as well as the high resonance frequency of this lowpressure sensor with very high sensitivity can be carried out.The optimum conditions are analysed and discussed.The nonlinearity of this low-pressure sensor is about 0.1%F·S,The ability of the protection to overpressure is more than 500 times of full-scale pressure.The resonance frequency is about 9kHz.更多还原