【摘要】 根据我们研制成功的铝硅双金属驱动微流量泵驱动结构的特点，本文介绍了一种实现微流量泵驱动结构与微流量传感器系统集成的方法。该方法在原微流量泵双金属驱动结构的单晶硅膜上集成制作了微流量传感器。这种一体化的集成驱动结构单元同时具有驱动功能和流量检测功能，并且制作工艺简单，为进一步实现与控制电路集成的集成微流量泵系统奠定了基础。更多还原

【Abstract】 We propose one method for fabricating the integrated micropump driving structure with microflow detection function.Based on the characteristics of the Al-Si bimetal driving structure, the microflow sensors are integrated on the same chip.The principle,structure and fabrication process are presented in this paper.This integrated unit has both functions driving and flow detection.This method is the prospect of the integrated micropump system.更多还原