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制备致密热解炭层的新工艺研究
STUDY ON THE NEW COATING TECHNOLOGY FOR DENSE PYROLYTIC CARBON LAYER
【摘要】 致密热解炭在工业各个技术部门正在得到广泛的应用。本文介绍采用丙烯(C3H6)和乙炔(C2H2)的混合气体制备致密热解炭层的新工艺,以消除只用丙烯作为反应气体时产生的热效应问题,讨论了沉积温度、反应气体浓度对致密热解炭层性能的影响。
【Abstract】 Dense pyrolytic carbon layer is widely used in industry. This paper describes a new coating technology which uses a gas mixture of propylene(C3H6) and acetylene(C2H2) as feedstock in order to eliminate the endothermal effects of propylene decomposition. The effects of deposition temperature and acetylene concentration on the properties of dense pyrocarbon layer are discussed. The optimum condition for preparing dense pyrolytic carbon layer has been chosen as:deposition temperature 1170~1370℃,concentrations of c3H6 and C2H2 as 13% and 15% respectively.
【关键词】 致密热解炭层;
混合气体;
热效应;
化学气相沉积;
流化床;
【Key words】 denes pyrolytic carbon layer; gas mixture; thermal effect; chemical vapor deposition; fluidized bed;
【Key words】 denes pyrolytic carbon layer; gas mixture; thermal effect; chemical vapor deposition; fluidized bed;
- 【文献出处】 新型碳材料 ,New Carbon Materials , 编辑部邮箱 ,1998年02期
- 【分类号】TQ127.11
- 【被引频次】11
- 【下载频次】149