【摘要】 采用真空反应蒸发技术，在有机薄膜基片上制备出高质量的ＩＴＯ透明导电薄膜，对薄膜的结构和光电特性进行了研究。制备的最佳薄膜在可见光范围的平均透过率达８４％，电阻率为８．２３×１０－４Ωｃｍ，载流子浓度为１．７２×１０２０ｃｍ－３。更多还原

【Abstract】 ITO films were prepared by evaporating In Sn alloys onto the polyester substrates in oxygen.Structure and optoelectrical properties of the deposited films were investigated.ITO films with low electrical resistivity(-8.23×10 -4 Ωcm),high visible transmission(>83%),and high carrier density(-1.72×10 20 cm -3 )can be obtained by suitable controlling the deposition parameters.更多还原