【摘要】 提出用多重网格矩量法计算高速集成电路中的三维互连结构的电容参数，用以提高三维互连结构参数提取时求解大型稠密满秩线性代数方程组的效率．给出了在均匀介质中正方体导体和双导体互连线的十字形交越的电容参数，计算结果与ＦＡＳＴＣＡＰ软件所得到的一致．更多还原

【Abstract】 The multi grid moment method is presented to compute the capacitance parameter of the three dimensional interconnects in high speed integrated circuit. The computational efficiency for the large dense full rank linear equations involved in the capacitance extraction is improved by multi grid segmentation scheme. The computational examples are given for cubical conductor and two bus cross over interconnects. The results are in good agreements with that of the FASTCAP software developed by MIT.更多还原