【摘要】 对影响金属氧化物薄膜气敏元件测量可靠性的因素——测试电压ＶＴ和湿度［Ｈ２Ｏ］进行了实验研究：给出了灵敏度Ｓｎ随测试电压ＶＴ变化的曲线，得出了存在一个Ｓｎ稳定的测试电压区间；给出了Ｓｎ随［Ｈ２Ｏ］变化曲线的形式，得出了Ｓｎ随［Ｈ２Ｏ］变化的相对起伏是大的结果；研究了相对灵敏度Ｓｎ′≡Ｓｎ（Ｃ０）／Ｓｎ（Ｃｓ），得出了Ｓｎ′基本不随湿度变化的结果．更多还原

【Abstract】 The factors such as testing voltage VT and humidity ,which have effects on the measuring reliability of metal oxide thin film gas sensor,have been studied via experiments. In this paper,the relational curves of sensitivity Sn versus testing voltage VT are given,and it is concluded that there exists a testing vltage interval of the stable Sn;besides,the variation curves of Sn with are given as well,thus it can be said that their relative fluctuations are large. By analyzing the relative sensitivity Sn’≡Sn(C0)/Sn(Cs),the result shows that Sn’ does not vary essentially with humidity.更多还原