【摘要】 利用光学显微镜和Ｘ射线衍射技术，分析了非晶态Ｓｅ和掺杂Ｓｂ的Ｓｅ薄膜的晶化特性。Ｓｅ薄膜由于保存周期不同以及Ｓｂ掺杂到Ｓｅ中的Ｓｂ含量的多少都会影响Ｓｅ的晶化特性；在热处理下薄膜的晶化呈现各向异性的择优生长。分析了晶化过程中微裂纹的产生，晶界的产生和体积收缩。薄膜与衬底之间的热应力是产生微裂纹的主要因素。更多还原

【Abstract】 Characteristics of crystallization of amorphous Se films and Se films doped with Sb ware invesigated by using optical microscope and X ray diffraction technology.The shelf storing period of Se in room temperature and the content of Sb in Se thin film will have influence on its characteristics.The Se crystallization in both kinds of thin films have the preferred orientation because of the initialization of crystallization and the shelf storing period.Micro structures’change in pure Se thin films existed in thermal treatment.The generation of the micro cracking in the crystallzation of amorphous Se thin film was analyzed,The results showed that generation of micro cracking have relation with the grain boundary and the stress produced by volume contraction during crystallization because of the atoms reordering and atoms moving,and the thermal strain between the thin film and the substrate,also,is an important factor.更多还原