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原子力/摩擦力显微图象的分析与测量
Analysis and Measurement of AFM/FFM Image
【摘要】 用表面粗糙度评定方法和分形几何方法,结合原子力/摩擦力显微图象的特点,编制了包括Ra,Rq,Sm,S,λa,λq及高度分布、承载率曲线、相关函数、功率谱和分形维数等参数的图象分析与测量的FORTRAN程序;用STR-180和STR-1000标样作了高度标定,对国产Nature磁带和进口Sony磁带的原子力/摩擦力显微图象进行了分析测量.结果表明:Nature磁带的粗糙度和粒度均比Sony磁带的大;微摩擦力与表面轮廓及表面轮廓斜率之间均有良好的对应关系.
【Abstract】 According to the characteristic of AFM/FFM image, FORTRAN program about the analysis and measurement of AFM/FFM image were compiled by using the methods of surface roughness and fractal geometry. The evaluation parameters such as R a, R q, S m, S , λ q, λ a, height distribution and surface bearing curves, auto covariance function and power spectrum density and fractal dimension were included. The height were calibrated by STR 180 and STR 1000 standard specimens, and then two magnetic tapes were observed and analyzed by the compiled program. The results shown that the compiled program was right and reasonable; the surface roughness and grain size of Nature tape were larger than that of Sony tape; micro scale friction force was not only related to the surface profile but also related to the slope of surface profile.
【Key words】 AFM/FFM nano scale measurement image analysis microtopography;
- 【文献出处】 摩擦学学报 ,TRIBOLOGY , 编辑部邮箱 ,1998年01期
- 【分类号】TH74
- 【被引频次】8
- 【下载频次】222