【摘要】 研究了多弧离子沉积（ＴｉＦｅＣｒ）Ｎ多元膜的性能，并与同一设备下沉积ＴｉＮ膜的性能进行比较。结果表明，（ＴｉＦｅＣｒ）Ｎ多元膜的力学性能和耐蚀性能均优于ＴｉＮ膜。定量金相分析结果表明，（ＴｉＦｅＣｒ）Ｎ多元膜的孔隙度比ＴｉＮ膜低得多。文中对多元膜的强化机理进行了讨论，认为孔隙度降低是使多元膜性能大幅度提高的主要原因。更多还原

【Abstract】 TiFeCr)N films are deposited by multi arc ion plating and the properties are studied.The results show that the mechanical properties and the corrosion resistance of (TiFeCr)N films are significantly higher than those of TiN films,that the porosity of (TiFeCr)N is much lower than that of TiN.The reasons of improvement on properties of the multi component films are also discussed.The lower porosity is thought to be one of the main reasons更多还原