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1.3μm低阈值InGaAsP/InP应变补偿MQW激光器的LP-MOCVD生长

Low Threshold 1.3 μm InGaAsP/InP Strained Compensated Multi quantum Well Lasers Grown by LP MOCVD

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【作者】 陈博王圩汪孝杰张静媛周帆马朝华

【Author】 Chen Bo Wang Wei Wang Xiaojie Zhang Jingyuan Zhou Fan Ma Chaohua (National Research Center for Optoelectronics Technology, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083)

【机构】 中国科学院半导体研究所国家光电子工艺中心

【摘要】 报道了用低压金属有机物化学气相淀积(LP-MOCVD)方法外延生长InGaAsP/InP应变补偿多量子阱结构。用此材料制备的掩埋异质结(BH)条形结构多量子阱激光器具有极低阈值电流4~6mA。20~40℃时特征温度T0高达67K,室温下外量子效率为0.3mW/mA。

【Abstract】 A 1.3 μm InGaAsP/InP strained compensated multi quantum wells structure grown by low pressure metalorganic chemical vapor deposition (LP MOCVD) was proposed. The threshold currents of buried heterostructure (BH) MQW lasers with this strained layers structure were 4 ̄6 mA mostly. The characteristic temperatures up to 67K were observed for the devices under a temperature between 20 ̄40℃, the single facet slope efficiency is 0.3 mW/mA at room temperature.

【关键词】 应变补偿InGaAsP激光器LP-MOCVD
【Key words】 strained compensatedInGaAsPlaserLP MOCVD
  • 【文献出处】 中国激光 ,CHINESE JOURNAL OF LASERS , 编辑部邮箱 ,1998年09期
  • 【分类号】TN248.4
  • 【被引频次】2
  • 【下载频次】81
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