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电镜样品的激光镀膜技术
A Technology for Plating Carbon Film on Electron Microscopy Sample Surface by Pules Laser
【摘要】 非导电的样品用扫描电镜进行观测时需要对样品进行镀膜处理以获得清晰的图像,本文介绍应用脉冲激光沉积(PLD)技术对非导电样品的表面进行镀膜处理的方法和实验装置及实验结果.
【Abstract】 A nonconducted sample is observed clearly by electron microscorpy, the sample have to be plated a conducted film. In this paper, the technology of pulesed laser diposition (PLD) to plate a carbon film on Electron Microscopy Sample surface is proposed, then the experimant device is discribed and the experiment results are discussed.
【关键词】 脉冲激光沉积(PLD);
石墨靶;
镀膜;
【Key words】 pulesed laser diposition; graphite target; preparation of a film;
【Key words】 pulesed laser diposition; graphite target; preparation of a film;
- 【文献出处】 杭州大学学报(自然科学版) ,JOURNAL OF HANGZHOU UNIVERSITY(NATURE SCIENCE) , 编辑部邮箱 ,1998年02期
- 【分类号】O484.1
- 【被引频次】1
- 【下载频次】67