【摘要】 用卢瑟福背散射－沟道技术（ＲＢＳ－Ｃ）和Ｘ射线衍射技术（ＸＲＤ）研究了Ｐｔ和Ｓ注入ＹＳＺ（Ｙ２Ｏ３稳定的ＺｒＯ２）后产生的损伤和退火过程中损伤的恢复及注入Ｐｔ的晶化。ＲＢＳ－Ｃ分析表明ＹＳＺ在室温下注入存在较强自退火效应；ＸＲＤ分析结果示出硫对铂的晶化产生很大影响。更多还原

【Abstract】 Both X- ray diffraction and Rutherford backscattering spectrometry- channeling have been used to analyse the damage of the dual ion (Pt and S) implanted yttria stabilized zirconia ,before, and after thermal annealing. The RBS- C results show high self-annealing effect . during implantation at room temperature, and the XRD measurements indicate that sulfur can affect strongly the orientation of Pt crystallines formed during thermal annealing. ,更多还原