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三维形貌检测的自动参考栅象法研究
AUTO REFERENCE GRATING METHOD OF 3 D SURFACE MEASUREMENT
【摘要】 本文提出了一种用于曲面形貌检测的傅里叶变换法中的参考栅象图的自动产生及误差修正方法,通过对实际测量图象的处理,证明该方法具有很好的使用效果,从而大大提高了傅里叶变换法检测曲面形貌的精度和实用性
【Abstract】 A new method of producing reference grating automatically and error correcting used in Fourier transform profilometry is proposed and verified by experiments.It is proved that the method has very good effect.Thereby this method improves the accuracy and practicality of Fourier transform profilometry greatly.
【关键词】 傅里叶变换;
三维形貌测量;
参考栅;
【Key words】 Fourier transform profilometry; 3 D surface measurement; Reference grating;
【Key words】 Fourier transform profilometry; 3 D surface measurement; Reference grating;
- 【文献出处】 光子学报 ,ACTA PHOTONICA SINICA , 编辑部邮箱 ,1998年06期
- 【分类号】O439
- 【被引频次】18
- 【下载频次】49