【摘要】 利用立式车间用球面干涉仪实现比较法球面面形测量，一次调整好以后可以达到多片快速测量，避免复杂的调整，通过监示器看到光圈；并可以通过条纹扫描技术实现光圈数Ｎ及局部光圈数ΔＮ的自动客观判读；对于低陡度非球面的多块拼接，可以籍助“非球面特征干涉图”实现快速初步拼接，然后再用每个子孔径的相位探测实现整个孔径的拼接，并可以通过数字的测量与波面相减自动获得非球面的面形误差。更多还原

【Abstract】 A new upright shop digital spherical wave interferometer is designed. By the comparision method, once the interferometer is finished adjusting, it can fast measure many identical spheric surfaces without any more complex adjustments, and the fringes can be displayed on the monitor screen. Using the fringes scanning technique, the ring number N and the local ring number ΔN will be determined automatically and objectively. Using the “Aspherics Characteristic Interferogram”, the low gradient aspherics can be fast patched up initially, then the whole surface is patched up by detecting the phase of each sub aperture. The figure error of the aspherics can also be achieved by aspherical wavefront subtract.更多还原