【摘要】 微器件装配技术是微机械的关键技术之一，本文从微器件装配系统的特性和功能出发，提出了一套微装配系统设计方案，并对系统各个组成部分进行分析，介绍了系统实现的方法。更多还原

【Abstract】 Microassembly is one of the key factors for micro electro mechanical systems.In this paper,a manipulator system for assemblying micro elements which is based on the properties and requirments of microassembly technology is presented.Design features of each components of this system are described and the methods to achieve these features are analysed.更多还原